Dongjin Semichem has begun development of inorganic (MOR) based extreme ultraviolet (EUV) photo resist (PR), which is an essential material for next-generation semiconductor ultra-fine processing. Japan’s JSR is developing MOR PR aiming to be the first in the world.
It was found that Dongjin Semichem began development of MOR PR with the recently commercialized EUV PR development team playing a central role. As MOR PR is a superior material in light absorption compared to organic (CAR) PR, it is expected to be used in the production line of ultra-fine semiconductors. PR is a key material applied on wafers to implement semiconductor circuits.
Inpria, a subsidiary of Japan’s JSR, is developing inorganic PR with the goal of being the first in the world to mass produce it. Inpria is an US inorganic PR company established in 2007. With JSR acquiring Inpria last year, they have set out to commercialize inorganic PR. After the acquisition of Inpria, Japan’s JSR began preparations to supply companies like Samsung Electronics, SK Hynix, TSMC, and Intel with inorganic PR for use in memory and system semiconductors.
Dongjin Semichem has been spurring the development of EUV PR development after the Japan’s export regulations in 2019. Through collaboration with Samsung Electronics, Dongjin Semichem succeeded in applying EUV PR in production lines for semiconductors, in addition to krypton fluoride (KrF), Argon Fluoride (ArF), and photo resist. Dongjin Semichem invested 112.7 billion KRW in the Baran Factory in Hwaseong-si, Gyeonggi-do to respond to PR demands. As Samsung Electronics uses Dongjin Semichem’s EUV PR, the potential for collaboration on inorganic EUV PR is brought up. SK Hynix is also showing an interest in inorganic PR.
◇Terms
Inorganic PR= Uses metal oxide material, unlike existing organic PR, which allows it to form clearer and denser circuit patterns. With grain sizes being 1/5 of organic PR, the grains of metal oxide absorb light and draw the circuit. Japan’s JSR had been developing it exclusively.
By Staff Reporter Jiwoong Kim (jw0316@etnews.com)