Jusung Engineering, a semiconductor equipment maker, said on February 22 that it has developed a plasma enhanced chemical vapor deposition system for the 7th-generastion liquid crystal display line.
Jusung`s new plasma enhanced CVD equipment can process LCDs in size of 2100x2300mm, larger than the one recently unveiled by AKT that is designed to process displays in size of 1800x2200mm.
Adopting new technology that can improve uniformity of plasma film without using showerhead, the plasma source, the new CVD system is able to raise quality of LCD products while sharply cutting maintenance costs.
The company said its new plasma enhanced CVD equipment, by removing lift pins, also can process displays in various sizes ranging from 15 to 46 inches, allowing to augment productivity dramatically. It can process 100 sheets of glass substrates per hour, nearly doubling the processing capability of other chemical vapor deposition equipment.
The company has developed CVD systems for both 6th and 7th-generation LCD lines simultaneously, investing some 10 million dollars. "We expect to take more than 70% of the market of plasma enhanced CVD equipment for 7th-generation LCD lines," said a manager at the company.