Samsung Hwaseong plant passed final approval
Rapid development after two years of cooperation between the two companies
Dongjin Semichem succeeded in developing an essential material for ultra-fine semiconductors, EUV photoresist (PR), in cooperation with Samsung Electronics. EUV PR is one of the three major export regulations by Japan in 2019. Products that had been entirely dependent on foreign countries due to high technical difficulty were localized through collaboration between domestic companies
Dongjin Semichem announced on the 19th that it recently passed Samsung Electronics' EUV PR reliability test (Qual). An industry official familiar with this issue said, “Dongjin Semichem developed EUV PR at its Hwaseong plant in Gyeonggi-do, and tested it at Samsung Electronics’ Hwaseong EUV line and received the final Qual.” And added “It was able to quickly develop EUV PR with a high level of technology through cooperation between the two companies’”
PR is also called photosensitive liquid as a key material for semiconductor exposure processes. When it is applied on a wafer and shoots light with semiconductor exposure equipment, it causes a chemical reaction and changes physical properties. If only the necessary part is left with a developer and the PR is washed away, a microcircuit is drawn.
Although PR for the process of KrF and ArF fluoride was mass-produced in Korea, there was no PR for EUV that could draw finer circuits. This is because development was that difficult. Most of the EUV PR used in Korea was imported from Japan.
Dongjin Semichem accelerated the development of EUV PR after Japan's export regulations in 2019. It has started to localize EUV PR by utilizing its own infrastructure such as the existing fluorinated argon exposure machine and Belgian semiconductor research institute IMEC EUV equipment. Earlier this year, it accelerated technology development by reinforcing EUV PR professionals. On top of that, Samsung Electronics actively supported the EUV test environment and achieved advanced quality that can be used in the field. "It is quite difficult to succeed in developing EUV PR in two years," an industry source said. “(Passing the EUV PR Qual) was an achievement supported by Samsung Electronics’ cooperation.”
It remains to be seen whether Samsung Electronics will immediately use Dongjin Semichem EUV PR into the semiconductor production line. Usually, when passing the Qual, it was used in mass production line. For this reason, some predict the possibility of supply as early as the first half of next year.
Samsung Electronics and Dongjin Semichem declined to comment on passing EUV PR Qual. An official from Samsung Electronics said, "We cannot confirm the Qual with our partners," adding, " Efforts are being made to diversify semiconductor materials, parts, and equipment."
Major schedule related to Dongjin Semichem Photoresist
By Staff Reporter Dong-jun Kwon (djkwon@etnews.com), By Staff Reporter Ji-woong Kim (jw0316@etnews.com)