Dongjin Semichem is pushing forward development of “EUV (Extreme Ultraviolet) PR (Photoresist)”. It is reported that the company has been adding necessary research personnel who will be in volved in the development and it has been conducting a variety of tests for the development at the same time.
According to the industry on Thursday, the company put out a job opening for experienced individuals with at least a master’s degree who will be involved in development of “PAG (Photoacid Generator) composite for EUV PR” in this first quarter. Individuals who will be hired are expected to work at the company’s R&D center in Pangyo.
EUV PR is a type of liquid that is absolutely needed in semiconductor manufacturing that involves very small chips. It is used during lithography process that utilizes an EUV light source with a wavelength of 13.5 nanometers. It is applied evenly on top of circular wafers and it leaves integrated circuit designs while it reacts with an EUV light.
PAG is a type of chemical that is a key component of CAR (Chemically Amplified Resist) PR. Dongjin Semichem plans to strengthen its research capabilities in development of EUV PR by increasing number of corresponding personnel.
The company currently makes KrF PRs that are used during 3D NAND flash manufacturing process as part of its photoresist business.
It is pushing forward studies on EUV PR after deciding that the specific photoresist is going be a source of its profit in the future. Since the Japanese government’s restriction on exportation of EUV photoresists to South Korea in 2019, the company has been making huge efforts in localizing EUV PR by utilizing in-house infrastructures such as ArF immersion lithography machine and EUV lithography machines from a semiconductor research hub called IMEC in Belgium. 90% of the EUV PR market is currently owned by Japanese companies such as JSR, Shinetsu Chemical, and TOK.
To run its new business smoothly, the company recruited Kim Young-seon, who used to work as the president of ASML South Korea, as the company’s vice chairman. It is reported that Vice Chairman Kim is currently participating in a variety of new businesses such as EUV PR at Dongjin Semichem while utilizing his experience at ASML that is the only EUV lithography machine manufacturer in the world.
In particular, the company is reportedly having a close relationship with a major semiconductor manufacturer from South Korea.
One official from the semiconductor industry said that Dongjin Semichem’s sample of EUV PR can be used to leave integrated circuit design and that the company still needs to go through a variety of processes such as quality maintenance and improvement.
Besides Dongjin Semichem, another South Korean company called SK Materials Performance that is an affiliated company of SK Materials is also working on localizing EUV PR.
Staff Reporter Kang, Hyeryung | kang@etnews.com