WONIK QnC Corp. succeeded in localization of excimer lamp for industry which Japanese Ushio had monopolized. Through its investment for R&D over 10 years, it raised the completion of technology. Starting from this year, it decided to come out for aggressive expansion of overseas markets.

WONIK QnC ( president Park Geun-won) announced on Feb.25 that the completion of technology in excimer lamp which it developed on its own was be similar or superior to competitors` level and also that starting from this year, it will drive actively market entry to domestic and overseas markets. Traditionally, Japanand Germany get edges over in the industrial lamps. In particular, though Ushio almost monopolizes the industrial lamps in semiconductor and display equipment section, WONIK QnC`s ambition is to cope with markets with domestic technology.

The excimer lamp is key part of display and semiconductor equipment. It plays a role in burning organic material by light. While the visible wavelength by human sight amounts to 400~700 nanometer, excimer is short-wavelength of 172 nanometer. With the use of xenon gas instead of general mercury gas, it is eco-friendly. The excimer lamp uses non-contacted dry cleaning method to wash the surface of wafer and glass with light.

WONIK QnC emphasized that non-contacted dry cleaning method to use excimer lamp is more effective than existing wet chemical cleaning or plasma cleaning method. Contrary to general plasma cleaning method to burn impurities electrically, non-contacted dry cleaning method is applicable to extensive arear without impact of pattern, according to this company.

It is hard for wet chemical cleaning to effectively eliminate pollutants in molecule size. Also, it has a problem with contamination of chemicals left on board after cleaning. It has another strength that despite frequent lighting, intensity of illumination can be maintain uniformly. While low pressure mercury lamp takes several minutes until actual use after lighting , excimer lamp can conserve energy and save time because it can turn on during its use and then turn off at light-out. Furthermore, its lamp size is small and it can be applicable to from display in size of note book PC or wafer to 8G level large panel. Traditionally, special light source market for industry had been led by Japanese Ushio and GS-YUYASA. There are some companies to sell these lamps under OEM supply, but they haven`t their own technology.

Without special overseas technology, WONIK QnC developed excimer lamp for industry for himself. Since its start of technology development, it had put lots of works over 10 years. The insider of WONIK QnC said, "we repeated product sales and then upgraded since 4~5 years ago, we have come to have more confidence to reach completion stage of our technology." "We started exporting to China and Taiwan. Our plan is to expand more overseas markets, henceforth."

Staff Reporter Bae, Ok-jin withok@etnews.com