Nextin, which is AP System’s subsidiary, is going to supply its equipment that inspects semiconductors’ front-end process to one of South Korea’s huge memory semiconductor manufacturer. While this is its first supply since it was established in 2010, this is also the first time when South Korean equipment that inspects wafer patterns is supplied. Corresponding markets are practically monopolized by KLA-Tencor that was bought out by Lam Research from the U.S. However industries believe that Nextin has emerged as a visible competitor to KLA-Tencor.
Nextin made an announcement on the 8th that it supplied AEGIS, which was developed by Nextin and inspects any defects of 2D wafer patterns, to a major South Korean semiconductor manufacturer.
This equipment uses UV and Deep UV that has shorter wavelength than UV and looks for any defects by capturing surface of wafers and inspecting difference of patterns with software. Optical technology and software that finds differences in patterns are the major technologies of this equipment. Nextin is the first South Korean equipment manufacturers to commercialize equipment that inspects any defects on wafer patterns. Nextin’s customers evaluated Nextin’s equipment as having more excellent inspection sensitivity and 30% faster speed compared to KLA-Tencor’s equipment. It is estimated that global markets for front-end process inspection equipment are worth about $1.35 billion (1.5 trillion KRW) per year and they have high technical entry barriers along with markets for steppers. Currently KLA-Tencor has more than 90% of share in global markets.
“KLA-Tencor has been acting very nonchalant about increasing prices of its equipment, excluding itself from claims for damages for delay in supplies and others by utilizing its position in related markets.” said a representative for a South Korean semiconductor element industry. “However it won’t be able to act nonchalant anymore if there are visible competitors.”

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<Logo of Nextin’s AEGIS >

Nextin’s major researchers including CEO Park Tae-hoon are veterans in equipment industries who had gained experiences from KLA-Tencor, Applied Materials and others. Nextin has been focusing for many years in developing technologies after attracting $13.6 million (15 billion KRW) of investments from 9 venture capitals such as Korea Investment Partners Co., Ltd. Through M&A with AP System in October of last year, it has strengthened its competitive edge for entering foreign markets.
Beside of AEGIS equipment that was supplied by Nextin this time, Nextin is also pushing to commercialize IRIS equipment that is specialized in inspecting wafer patterns of 3D NAND-Flash semiconductors. This equipment is equipped with multi-non-focal plane imaging technology, and Nextin is expecting that it will be able to receive orders for IRIS shortly.
AEGIS also passed performance evaluation of semiconductor equipment and materials that is carried out by South Korean element businesses. Major point of this evaluation is to have element industries to evaluate performance of products that are developed by small and medium companies and issue performance certificates after evaluations. This evaluation was prepared to help small and medium companies to overcome their low awareness and introduce and sell equipment and materials to foreign element industries.
“We are actively pushing for foreign exports based on this successful incident of supplying AEGIS and receiving certificates for performance.” said a representative for Nextin. “There will be positive results shortly.”
Staff Reporter Han, Juyeop | powerusr@etnews.com